A highly sensitive MEMS silicon‐hair device reproducing the function of hair follicle

Author:

Hamamoto Koki1,Terao Kyohei1,Shimokawa Fusao1,Takao Hidekuni1

Affiliation:

1. Fuculty of Engineering and Design Kagawa University Japan

Publisher

Wiley

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy,Signal Processing

Reference10 articles.

1. A novel configuration of tactile sensor to acquire the correlation between surface roughness and frictional force;Kozai R;IEEE MEMS 2015,2015

2. A “micro‐macro” integrated planar MEMS tactile sensor for precise modeling and measurement of fingertip sensation;Watatani K;IEEE MEMS 2017,2017

3. Air flow sensor modeled on wind receptor hairs of insects;Ozaki Y;MEMS 2000, Miyazaki,2000

4. Design and Analysis of a New Hair Sensor for Multi-Physical Signal Measurement

5. All-polymer hair structure with embedded three-dimensional piezoresistive force sensors

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