The Effect of Synthesis Conditions on the Short-Range Order Characteristics in Silicon Nitride Layers-Reference-Cited by-同舟云学术

The Effect of Synthesis Conditions on the Short-Range Order Characteristics in Silicon Nitride Layers

Published:1990-05-16 Issue:1 Volume:119 Page:113-125
ISSN:0031-8965
Container-title:physica status solidi (a)
language:de
Short-container-title:phys. stat. sol. (a)

Author:

Repnikova E. A.,Gurtov V. A.,Panova Z. V.

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference12 articles.

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2. The hydrogen content of plasma-deposited silicon nitride

3. , and , The Short-Range Order in Amorphous Films of Silicon Nitride, 9th All-Union Symp. Electronic Process Surface and Thin Layer Semiconductors, Vol. 2, Novosibirsk 1988 (p. 134).

4. and , X-rays Scattering Theory, Moscow State Univ. Press, 1978 (p. 217).

5. X-Ray Diffraction, Addison-Wesley Reading 1969 (p. 135).

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