Shallow diffusions of zinc in GaAs at 700 °C

Author:

Tuck B.,Houghton A. J. N.

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference15 articles.

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. GaAs doping by rapid thermal diffusion of a laser-deposited elemental Zn source film: Shallow and laterally graded diffusions;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-01

2. The effect of As on Zn diffusion-induced disordering of AlAs/GaAs superlattices;Semiconductor Science and Technology;1990-06-01

3. Modelling of the generation of Ga interstitials during the diffusion of Zn into GaAs;International Journal of Numerical Modelling: Electronic Networks, Devices and Fields;1990-06

4. Zn diffusion-induced disorder in AlAs/GaAs superlattices;Semiconductor Science and Technology;1989-10-01

5. Shallow zinc diffusion in liquid phase epitaxial GaAs and (GaAl)As at 600 °C;Applied Physics Letters;1983-01

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