In-situ Electron Microscopy Studies of Hot Filament Chemical Vapour Deposition Diamond Thin Film Growth in an Environmental SEM-Reference-Cited by-同舟云学术

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In-situ Electron Microscopy Studies of Hot Filament Chemical Vapour Deposition Diamond Thin Film Growth in an Environmental SEM

Published:1996-03-16 Issue:1 Volume:154 Page:43-54
ISSN:0031-8965
Container-title:Physica Status Solidi (a)
language:en
Short-container-title:Phys. Stat. Sol. (a)

Author:

Charyshkin E.,Kinaev N. N.,Waterworth M.,Cousens D. R.,Calos N.,Bostrom T.,Ilyushechkin A.

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. and , Diamond and Graphite Growth from Gas Phase, Izd. Nauka, Moscow 1977 (in Russian).

2. Vapor deposition of diamond thin films on various substrates

3. Diamond growth with locally supplied methane and acetylene

4. Growth of diamond thin films by electron-assisted chemical vapour deposition and their characterization

5. Real time monitoring of filament-assisted chemically vapor deposited diamond by spectroscopic ellipsometry

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