1. See, for example, references in: Defects in Crystalline Solids, Vol. 8: Ion Implantation, Ed. , , and , North-Holland Publ. Co., Amsterdam 1973.
2. , and , Development of Ion Implantation Techniques for Microelectronics, Summary Report, Contract No. NAS12-124, Hughes Research Laboratories, October 1969.
3. , , , , and , Proc. Internat. Summer School on Physics of Ionized Gases, Ed. Herzegnovi, Youguslavia, July 6–16, 1970.
4. , , , , and , Proc. Third Intantation Conf. Ion Impl. Ed. et al., Plenum Press, New York 1973.
5. Effects of Implantation Temperature on Lattice Location of Tellurium Implanted in Gallium Arsenide