Residual lattice disorder in self-implanted silicon after pulsed laser irradiation

Author:

Servidori M.,Zani A.,Garulli G.

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Laser-Solid Interactions and Laser Processing 1978, Ed. and , AIP Conf. Proc. No. 50, American Institute of Physics, New York 1979.

2. Laser and Electron Beam Processing of Materials, Ed. and , Academic Press, New York 1980.

3. Laser and Electron-Beam Solid Interactions and Materials Processing, Ed. , and , North-Holland, Publ. Co., New York 1981.

4. Two-stage laser annealing of lattice disorder in phosphorus implanted silicon

5. , , , and , Semiconductor Characterization Techniques, Electrochem. Soc., Princeton, N. J. 1978 (p. 502).

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