Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Surface damage in processed silicon;Materials Science and Engineering: B;1996-12
2. Study of the electrical active defects induced by reactive ion etching in n-type silicon;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-09