Author:
Khokhlov A. F.,Mashin A. I.,Ebshov A. V.,Mobdvinova Yu. A.
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Doping and impurity compensation by ion implantation in a-SiGe films;Semiconductors;1998-10
2. Germanium implantation into amorphous silicon films;Ion Beam Modification of Materials;1996
3. Germanium implantation into amorphous silicon films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-12