Plasmaätzen dünner Schichten organischer Polymere. Teil VIII. Zum Plasmaätzen von Poly(vinylalkohol)
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Published:1991-05
Issue:5
Volume:42
Page:217-221
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ISSN:0323-7648
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Container-title:Acta Polymerica
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language:
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Short-container-title:Acta Polym.
Author:
Eggert L.,Abraham W.
Subject
Polymers and Plastics,General Chemical Engineering