Plasma hydrogenated, reactively sputtered aluminium oxide for silicon surface passivation
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssr.201308027/fullpdf
Reference16 articles.
1. Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
2. High Quality Aluminum Oxide Passivation Layer for Crystalline Silicon Solar Cells Deposited by Parallel-Plate Plasma-Enhanced Chemical Vapor Deposition
3. Surface passivation of c-Si by atmospheric pressure chemical vapor deposition of Al2O3
4. Effective surface passivation of crystalline silicon by rf sputtered aluminum oxide
5. Process Control of Reactive Sputter Deposition of AlO $_{x}$ and Improved Surface Passivation of Crystalline Silicon
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