Preferential MBE Growth and Characterization of SiGe Nanoislands on Depth-Selective Si Pits Etched by Ar+ Plasma

Author:

Şeker İsa1,Karatutlu Ali23ORCID,İstengir Sümeyra4

Affiliation:

1. Fatih University, Bionanotechnology Research and Development Center (BINATAM); Buyukcekmece 34500 Istanbul Turkey

2. Materials Science and Nanotechnology Department, UNAM-National Nanotechnology Research Center, Bilkent University; 06800 Ankara Turkey

3. The Institute of Materials Science and Nanotechnology, Bilkent University; 06800 Ankara Turkey

4. Department of Physics, Yıldız Technical University; Davutpaşa 34210 Istanbul Turkey

Funder

Fatih University (Turkey)

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

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