SIMS depth profiling of ‘frozen’ samples: in search of ultimate depth resolution regime-Reference-Cited by-同舟云学术

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SIMS depth profiling of ‘frozen’ samples: in search of ultimate depth resolution regime

Published:2016-06-24 Issue:2 Volume:49 Page:145-148
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Kudriavtsev Y.¹,Hernandez A.¹,Asomoza R.¹,Gallardo S.²,Lopez M.²,Moiseev K.³

Affiliation:

1. Departamento Ingeniería Eléctrica - SEES; Cinvestav-IPN; Mexico City Mexico

2. Departamento Fisica; Cinvestav-IPN; Mexico City Mexico

3. Ioffe Physic-Technical Institute; S-Petersburg Russia

Funder

Consejo Nacional de Ciencia y Tecnología

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference9 articles.

1. S. Gallardo Yu. Kudriavtsev A. Villegas A. Godines R. Asomoza Proceedings of 3 rd Int. Conference of Electrical and Electronic Engineering ICEEE 2006 290 293

2. Depth-profile analysis of nanostructures by SIMS: Depth resolution function

3. Effects of Sample Cooling on Depth Profiling of Na in SiO2 Thin Films

4. Theory of ripple topography induced by ion bombardment

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Restoration of the original depth distribution from experimental SIMS profile using the depth resolution function in framework of RMR model;Journal of Vacuum Science & Technology B;2023-03-01

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