Affiliation:
1. Faculty of Engineering; Utsunomiya University/School of Physics, University College Dublin; Japan
2. Faculty of Engineering; Utsunomiya University; Japan
Subject
Applied Mathematics,Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy,Signal Processing
Reference30 articles.
1. Bakshi V EUV Sources for lithography SPIE Washington 2006
2. Attwood DT Soft X-rays and extreme ultraviolet radiation Cambridge University Press Cambridge 2000
3. Progress in semiconductor lithology techniques and the current status of EUV lithography;Okazaki;Reza Gakushi,2010
4. Banine V EUV lithography and EUVL sources: From the beginning to NEX and beyond Proceedings of the 2011 International Workshop on EUVL, EUV Litho Inc., Maui, Hawaii 2011
5. Unresolved transition arrays;Bauch;Physica Scripta,1988
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