Efficient Fabrication of High‐Density Ensembles of Color Centers via Ion Implantation on a Hot Diamond Substrate

Author:

Nieto Hernandez E.12ORCID,Andrini G.234ORCID,Crnjac A.5ORCID,Brajkovic M.5,Picariello F.34ORCID,Corte E.124ORCID,Pugliese V.12ORCID,Matijević M.15ORCID,Aprà P.12ORCID,Varzi V.1ORCID,Forneris J.124ORCID,Genovese M.24ORCID,Siketic Z.5ORCID,Jaksic M.5ORCID,Ditalia Tchernij S.124

Affiliation:

1. Physics Department University of Torino Torino 10125 Italy

2. Istituto Nazionale di Fisica Nucleare sez. Torino Torino 10125 Italy

3. Dipartimento di Elettronica e Telecomunicazioni Politecnico di Torino Torino 10129 Italy

4. Division of Quantum Metrology and Nanotechnologies Istituto Nazionale di Ricerca Metrologica (INRiM) Torino 10135 Italy

5. Laboratory for Ion Beam Interactions Ruđer Bosǩović Institute Zagreb 10000 Croatia

Abstract

AbstractNitrogen‐vacancy (NV) centers in diamonds are one of the most promising systems for quantum technologies, including quantum metrology and sensing. A promising strategy for the achievement of high sensitivity to external fields relies on the exploitation of large ensembles of NV centers, whose fabrication by ion implantation is upper limited by the amount of radiation damage introduced in the diamond lattice. In this work an approach is demonstrated to increase the density of NV centers upon the high‐fluence implantation of MeV N2+ ions on a hot target substrate (>550 °C). The results show that with respect to room‐temperature implantation, the high‐temperature process increases the vacancy density threshold required for the irreversible conversion of diamond to a graphitic phase, thus enabling to achieve higher density ensembles. Furthermore, the formation efficiency of color centers is investigated on diamond substrates implanted at varying temperatures with MeV N2+ and Mg+ ions revealing that the formation efficiency of both NV centers and magnesium‐vacancy (MgV) centers increases with the implantation temperature.

Funder

Compagnia di San Paolo

Instituto Nazionale di Fisica Nucleare

Ministero dell’Istruzione, dell’Università e della Ricerca

Publisher

Wiley

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