Interlaboratory study comparing analyses of simulated angle-resolved X-ray photoelectron spectroscopy data-Reference-Cited by-同舟云学术

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Interlaboratory study comparing analyses of simulated angle-resolved X-ray photoelectron spectroscopy data

Published:2014-03-18 Issue:5 Volume:46 Page:321-332
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Tasneem G.¹,Werner W. S. M.¹,Smekal W.¹,Powell C. J.²

Affiliation:

1. Institute of Applied Physics; Vienna University of Technology; A 1040 Vienna Austria

2. Materials Measurements Science Division; National Institute of Standards and Technology; Gaithersburg MD 20899-8370 USA

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sia.5482/fullpdf

Reference19 articles.

1. Report on the 47th IUVSTA Workshop ‘Angle-Resolved XPS: the current status and future prospects for angle-resolved XPS of nano and subnano films’

2. XPS and angle resolved XPS, in the semiconductor industry: Characterization and metrology control of ultra-thin films

3. Non-destructive analysis of ultrathin dielectric films

4. http://www.vamas.org

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. International standardization and metrology as tools to address the comparability and reproducibility challenges in XPS measurements;Journal of Vacuum Science & Technology A;2020-03

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