Monte Carlo simulation of full energy spectrum of electrons emitted from silicon in Auger electron spectroscopy-Reference-Cited by-同舟云学术

Monte Carlo simulation of full energy spectrum of electrons emitted from silicon in Auger electron spectroscopy

Published:2014-10-07 Issue:1 Volume:47 Page:113-119
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Cao N.¹,Da B.¹,Ming Y.²,Mao S. F.³,Goto K.⁴,Ding Z. J.¹

Affiliation:

1. Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics; University of Science and Technology of China; 96 Jinzhai Road Hefei Anhui 230026 PR China

2. School of Physics and Material Science; Anhui University; Hefei Anhui 230601 PR China

3. School of Nuclear Science and Technology; University of Science and Technology of China; 96 Jinzhai Road Hefei Anhui 230026 PR China

4. National Institute of Advanced Industrial Science and Technology (AIST); Moriyama-ku Nagoya Aichi, Chubu 463-8560 Japan

Funder

National Natural Science Foundation of China

National Basic Research Program of China

Ministry of Education of China

Chinese Academy of Sciences

‘111’ project

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference49 articles.

1. Backscattering correction for quantitative Auger analysis

2. Backscattering correction for quantitative Auger analysis III. A simple functional representation of electron backscattering factors

3. Quantitative Analysis by Auger Electron Spectroscopy

4. The Backscattering Correction Factor in AES: A New Outlook

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