Author:
Alric J�r�me,David Ghislain,Boutevin Bernard,Rousseau Alain,Robin Jean-Jacques
Subject
Polymers and Plastics,Materials Chemistry,Organic Chemistry
Reference39 articles.
1. and Les Acrylates et Polyacrylates Fluor�s - D�riv�s et Applications, E. Puteau (1988).
2. Desk Referenc;Boutevin,1997
3. Thickness Dependence of Etching Rate in Dry Photoetching of Organic Resists
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