1. “Cramming more components onto integrated circuits,”;Moore;Electronics,1965
2. “Analysis: Litho world needs a shrink,”;McGrath;EE Times,2011
3. “Globalfoundries, TSMC square off in litho,”;LaPedus;EE Times,2011
4. The International Technology Roadmap for Semiconductors 2010 http://www.itrs.net/Links/2010ITRS/Home2010.htm