Oxygen partial pressure influenced stoichiometry, structural, electrical, and optical properties of DC reactive sputtered hafnium oxide films

Author:

Venkataiah Sunke1,Chandra S.V. Jagadeesh2,Chalapathi Uppala3,Ramana Ch.V.V.4,Uthanna Suda1

Affiliation:

1. Department of Physics Sri Venkateswara University Tirupati India

2. Department of Electronics and Communication Engineering Vignan's Institute of Information Technology (A) Visakhapatnam India

3. Center for Opto‐electronic Materials and Devices Korea Institute of Science and Technology (KIST) Seoul Republic of Korea

4. Department of Electrical and Electronics Engineering Science University of Johannesburg Johannesburg South Africa

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference32 articles.

1. Real time monitoring of PCR amplification of proto‐oncogene c‐MYC using a Ta2O5 electrolyte–insulator–semiconductor sensor;Rita B;Biosens Bioelectron,2011

2. Nanostructured hafnium oxide thin films for sensing carbon monoxide: an experimental investigation;Dave V;Mater Today: Proc,2018

3. Application of metal oxide semiconductors in light driven organic transformations;Paiva PR;Cat Sci Technol,2019

4. Effect of substrate temperature on the structural, optical and electrical properties of DC magnetron sputtered tantalum oxide films;Jagadeesh Chandra SV;Appl Surf Sci,2008

5. Effect of post metallization annealing on structural and electrical properties of Ge metal-oxide-semiconductor (MOS) capacitors with Pt/HfO2 gate stack

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