Characteristics of thin-film spiral antenna-coupled Bi microbolometer fabricated on Si3 N4 /SiO2 membrane
Author:
Affiliation:
1. Department of Electrical and Electronic Engineering; National Defense Academy, 1-10-20 Hashirimizu; Yokosuka 239-8686 Japan
Funder
KAKENHI
Publisher
Wiley
Subject
Electrical and Electronic Engineering
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