1. Department of Applied Chemistry Osaka Institute of Technology Osaka Japan
2. Nanomaterials Microdevices Research Center Osaka Institute of Technology Osaka Japan
3. Precision Machining Section Industrial Technology Center of Okayama Prefecture Okayama Japan
4. Function Materials Section Industrial Technology Center of Okayama Prefecture Okayama Japan
5. Graduate School of Engineering University of Hyogo Himeji Hyogo Japan