Affiliation:
1. Aalen University of Applied Science Beethovenstraße 1 73430 Aalen Germany
2. University of Stuttgart Pfaffenwaldring 43 70569 Stuttgart Germany
Abstract
AbstractIncreasing the material ablation rate in micromachining of precise geometries by ultrashort‐pulsed laser treatment with high average power causes a decrease of achievable surface quality due to heat accumulation. To overcome this drawback, combined laser processes offer a significant increase of the overall productivity by the implementation of laser cleaning and polishing processes that require negligible additional processing time, but allow material removal to be performed with maximum process efficiency.