Relationship between Condition of Deposition and Properties of W-Ti-N Thin Films Prepared by Reactive Magnetron Sputtering
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Reference13 articles.
1. Diffusion barriers in thin films
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5. Columnar microstructures in magnetron-sputtered refractory metal thin films of tungsten, molybdenum and W-Ti-(N)
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1. High-temperature wear mechanisms of TiNbWN films: Role of nanocrystalline oxides formation;Friction;2022-07-18
2. Influence of Microstructure, Composition and Morphology on Tribological Performance of WTiN Coatings Obtained by DC Magnetron Sputtering at Various Working Pressures;Journal of Materials Engineering and Performance;2020-08
3. Correlation between optical, structural and microstructural properties of Ti–W–N thin films;Ceramics International;2020-04
4. Effect of the deposition temperature on the phase- structural state and hardness of ion-plasma coatings obtained on the basis of the quasi-binary WB2-TiB2 system;Functional Materials;2020-03-13
5. Characterization of nano-crystalline Ti–W–N thin films for diffusion barrier application: a structural, microstructural, morphological and mechanical study;Applied Physics A;2018-11-11
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