Depth profiling in secondary ion mass spectrometry for ultra-thin layer with nanometer order thickness by mesa-structure fabrication-Reference-Cited by-同舟云学术

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Depth profiling in secondary ion mass spectrometry for ultra-thin layer with nanometer order thickness by mesa-structure fabrication

Published:2012-01-30 Issue:5 Volume:44 Page:614-617
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Seki S.¹,Tamura H.¹,Wada Y.²,Tsutsui K.²

Affiliation:

1. Faculty of Engineering; Takushoku University; 815-1 Tatemachi Hachioji Tokyo 193-0985 Japan

2. Graduate School of Interdisciplinary New Science; Toyo University

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sia.4875/fullpdf

Reference13 articles.

1. Semiconductor profiling with sub-nm resolution: Challenges and solutions

2. Depth profiling of polycrystalline multilayers using aBuckminsterfullerene projectile

3. Improvements in the Routine Depth Profiling of Doping Elements

4. Results of a SIMS round robin sponsored by ASTM committee E-42 on surface analysis

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Compositional depth profiles of the type 316 stainless steel undergone the corrosion in liquid lithium using laser-induced breakdown spectroscopy;Journal of Nuclear Materials;2017-12

2. Depth profiling of nanometer thin layers by pulsed micro-discharge with inductively coupled plasma mass spectrometry;Spectrochimica Acta Part B: Atomic Spectroscopy;2015-09

3. Volumetric distribution of Pt nanoparticles supported on mesoporous carbon substrates studied by X-ray photoelectron spectroscopy depth profiling;Carbon;2013-04

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