Prozeßmodellierung bei der metallorganischen Gasphasenepitaxie
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Published:1997-07
Issue:7
Volume:69
Page:923-930
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ISSN:0009-286X
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Container-title:Chemie Ingenieur Technik
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language:en
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Short-container-title:Chemie Ingenieur Technik
Author:
Dauelsberg Martin,Durst Franz,Kadinski Lew,Makarov Yuri N.
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry