1. Center for Photonics and 2D Materials Moscow Institute of Physics and Technology Dolgoprudny 141701 Russia
2. Prokhorov General Physics Institute of the Russian Academy of Sciences Moscow 119991 Russia
3. Institute of Solid State Physics of the Russian Academy of Sciences Chernogolovka 142432 Russia
4. Skolkovo Institute of Science and Technology Moscow 121205 Russia
5. ITMO University St. Petersburg 191002 Russia
6. Qingdao Innovation and Development Center Harbin Engineering University Qingdao 266000 China