1. Institute of Laser Engineering, Faculty of Materials and Manufacturing Beijing University of Technology Beijing 100124 China
2. State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument Tsinghua University Beijing 100084 China
3. Key Laboratory of Trans‐scale Laser Manufacturing Technology, Ministry of Education Beijing University of Technology Beijing 100124 China
4. Beijing Engineering Research Center of Laser Technology Beijing University of Technology Beijing 100124 China