1. National Research Center for High‐Efficiency Grinding, College of Mechanical and Vehicle Engineering Hunan University Changsha 410082 P. R. China
2. Greater Bay Area Institute for Innovation Hunan University Guangzhou Guangdong 511300 P. R. China
3. Advanced Manufacturing Laboratory of Micro‐Nano Optical Devices, Shenzhen Research Institute Hunan University Shenzhen 518000 P. R. China
4. Microsystem & Terahertz Research Center China Academy of Engineering Physics (CAEP) Chengdu 610200 P. R. China
5. Institute of Optics and Electronics Chinese Academy of Sciences Chengdu Sichuan 610209 P. R. China