1. Laser Micro/Nano Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology Beijing 100081 P. R. China
2. Yangtze Delta Region Academy of Beijing Institute of Technology Jiaxing 314019 P. R. China
3. Beijing Institute of Technology Chongqing Innovation Center Chongqing 401120 China
4. School of Physics Beijing Institute of Technology Beijing 100081 P. R. China
5. School of Optics and Photonics Beijing Institute of Technology Beijing 100081 P. R. China
6. Institute of Medical Robotics School of Biomedical Engineering Shanghai Jiao Tong University No. 800 Dongchuan Road Shanghai 200240 P. R. China