1. School of Physics and Zhejiang Province Key Laboratory of Quantum Technology and Device Zhejiang University Hangzhou Zhejiang 310058 China
2. State Key Laboratory for Silicon and Advanced Semiconductor Materials Zhejiang University Hangzhou Zhejiang 310058 China
3. Interdisciplinary Center for Quantum Information Zhejiang University Hangzhou Zhejiang 310058 China
4. Hangzhou Institute for Advanced Study University of Chinese Academy of Sciences Hangzhou Zhejiang 310024 China
5. Department of Electrical and Computer Engineering The University of North Carolina at Charlotte Charlotte NC 28223 USA
6. Hefei National Laboratory Hefei Anhui 230088 China
7. Research Center for Sensing Materials and Devices Zhejiang Lab Hangzhou Zhejiang 311121 China