1. School of Microelectronics Hefei University of Technology Hefei Anhui 230009 China
2. Institute of Materials Research and Engineering (IMRE) Agency for Science Technology and Research (A*STAR) 2 Fusionopolis Way, Innovis #08‐03 Singapore 138634 Republic of Singapore
3. School of Materials Science and Engineering Anhui University Hefei Anhui 230601 China
4. School of Materials Science and Engineering Hefei University of Technology Hefei Anhui 230009 China
5. School of Physics and Microelectronics Key Laboratory of Material Physics Ministry of Education Zhengzhou University Zhengzhou Henan 450052 China
6. China Resources Microelectronics (Chongqing) Limited Chongqing 401332 China