1. Center for advanced Laser Technology Hebei University of Technology Tianjin 300401 China
2. Hebei Key Laboratory of Advanced Laser Technology and Equipment Tianjin 300401 China
3. Key Lab of Semiconductor Materials Science Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China
4. Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China
5. Department of Mechanical and Automation Engineering The Chinese University of Hong Kong Hong Kong 999077 China
6. Wuhan Raycus Co. Ltd. Wuhan 430223 China