1. School of Microelectronics Dalian University of Technology Dalian Liaoning 116024 China
2. State Key Laboratory of ASIC and Systems School of Microelectronics Fudan University Shanghai 200433 China
3. National Integrated Circuit Innovation Center Shanghai 201203 China
4. Institute of Microelectronics Tsinghua University Beijing 100084 China
5. Key Laboratory of Materials Modification by Laser Ion and Electron Beams (Ministry of Education) School of Physics Dalian University of Technology Dalian Liaoning 116024 China