The Growth, Composition, and Functional Properties of Self‐Organized Nanostructured ZrO 2 ‐Al 2 O 3 Anodic Films for Advanced Dielectric Applications-Reference-Cited by-同舟云学术

The Growth, Composition, and Functional Properties of Self‐Organized Nanostructured ZrO 2 ‐Al 2 O 3 Anodic Films for Advanced Dielectric Applications

Published:2021-09-08 Issue:10 Volume:7 Page:2100505
ISSN:2199-160X
Container-title:Advanced Electronic Materials
language:en
Short-container-title:Adv. Electron. Mater.

Author:

Kamnev Kirill¹^ORCID,Sepúlveda Marcela¹^ORCID,Bendova Maria¹,Pytlicek Zdenek¹^ORCID,Prasek Jan¹²^ORCID,Kolibalova Eva¹^ORCID,Michalicka Jan¹^ORCID,Mozalev Alexander¹²^ORCID

Affiliation:

1. CEITEC–Central European Institute of Technology Brno University of Technology Purkynova 123 Brno 61200 Czech Republic

2. Department of Microelectronics Faculty of Electrical Engineering and Communication Brno University of Technology Technicka 10 Brno 61600 Czech Republic

Funder

Ministerstvo Školství, Mládeže a Tělovýchovy

Grantová Agentura České Republiky

Publisher

Wiley

Subject

Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/aelm.202100505

Reference49 articles.

1. Alternative dielectrics to silicon dioxide for memory and logic devices

2. Microcapacitors for Energy Storage: General Characteristics and Overview of Recent Progress