1. Laboratory for MEMS Applications; IMTEK - Department of Microsystems Engineering; University of Freiburg; Georges-Koehler-Allee 103 79110 Freiburg Germany
2. FIT; University of Freiburg; Georges-Koehler-Allee 105 79110 Freiburg Germany
3. Department of Chemistry; Simon Fraser University; 8888 University Drive Burnaby BC V5A 1S6 Canada
4. Institute of Inorganic and Analytical Chemistry; University of Freiburg; Albertstraße 21 79104 Freiburg Germany
5. FMF - Freiburg Materials Research Center; Stefan-Meier-Straße 21 79104 Freiburg Germany