1. Institute of Electronic Materials Technology; ul. Wolczynska 133 01-919 Warsaw Poland
2. Institute of Physics; Polish Academy of Sciences; Aleja Lotnikow 32/46 02-668 Warsaw Poland
3. Laser Processing Group; Instituto de Óptica, CSIC; C/Serrano 121 28006 Madrid Spain
4. Centre of New Technologies; University of Warsaw; ul. Banacha 2C 02-097 Warsaw Poland