Plasmonic Lithography: Recent Progress-Reference-Cited by-同舟云学术

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Plasmonic Lithography: Recent Progress

Published:2019-05-02 Issue:14 Volume:7 Page:1801653
ISSN:2195-1071
Container-title:Advanced Optical Materials
language:en
Short-container-title:Adv. Optical Mater.

Author:

Hong Fan¹,Blaikie Richard¹^ORCID

Affiliation:

1. Dodd‐Walls Centre for Quantum and Photonic TechnologiesMacDiarmid Institute for Advanced Materials and NanotechnologyDepartment of PhysicsUniversity of Otago PO Box 56 Dunedin 9054 New Zealand

Publisher

Wiley

Subject

Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adom.201801653

Reference118 articles.

1. Fundamentals of Microfabrication

2. Projection optical lithography

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3. Lithography mask thermal and stress effect for the machine overlay compensation;Journal of Vacuum Science & Technology B;2024-07-01

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