Low-Temperature Atomic Layer Deposition of Copper Metal Thin Films: Self-Limiting Surface Reaction of Copper Dimethylamino-2-propoxide with Diethylzinc
Author:
Publisher
Wiley
Subject
General Chemistry,Catalysis
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/anie.200900414/fullpdf
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