1. Department of Metrology and Optoelectronics Faculty of Electronics, Telecommunications, and Informatics Gdańsk University of Technology 11/12 Narutowicza St. Gdańsk 80‐233 Poland
2. CSIR‐Institute of Minerals and Materials Technology Bhubaneswar Odisha 751013 India
3. Division of Nanometrology Wrocław University of Science and Technology Faculty of Microsystem Electronics and Photonics ul. Z. Janiszewskiego 11/17 Wrocław PL‐50372 Poland
4. Institute of Experimental Physics Faculty of Physics University of Warsaw Pasteura 5 Warsaw 02‐093 Poland
5. Institute for Materials Research (IMO) Hasselt University Diepenbeek 3590 Belgium
6. IMOMEC IMEC vzw Diepenbeek 3590 Belgium