Feasibility and Structural Transformation of Electrodeposited Copper Foils for Graphene Synthesis by Plasma‐Enhanced Chemical Vapor Deposition: Implications for High‐Frequency Applications

Author:

Lu Chen‐Hsuan1ORCID,Shang Kuang‐Ming2ORCID,Lee Shi‐Ri3ORCID,Li Jheng‐Ying4,Lee Patricia T.C.5,Leu Chyi‐Ming4ORCID,Tai Yu‐Chong26ORCID,Yeh Nai‐Chang789ORCID

Affiliation:

1. Department of Applied Physics and Materials Science California Institute of Technology Pasadena CA 91125 USA

2. Department of Medical Engineering California Institute of Technology Pasadena CA 91125 USA

3. Department of Electron Microscopy Development and Application Division of Platform Technology for Advanced Materials Material and Chemical Research Laboratories Industrial Technology Research Institute Hsinchu 31057 Taiwan

4. Material and Chemical Research Laboratories Industrial Technology Research Institute Hsinchu 31057 Taiwan

5. Department of Industrial Technology Ministry of Economic Affairs Taipei 100210 Taiwan

6. Department of Electrical Engineering California Institute of Technology Pasadena CA 91125 USA

7. Department of Physics California Institute of Technology Pasadena CA 91125 USA

8. Kavli Nanoscience Institute California Institute of Technology Pasadena CA 91125 USA

9. Department of Physics National Taiwan Normal University Taipei 116 Taiwan

Abstract

AbstractLarge‐area graphene is typically synthesized on rolled‐annealed copper foils, which require transferring to other substrates for applications. This study examines large‐area graphene growth on electrodeposited (ED) copper foils—used in lithium‐ion batteries and printed circuit boards—via plasma‐enhanced chemical vapor deposition (PECVD). It reveals that, for a set plasma power, a minimum growth time ensures full graphene coverage, leading to monolayer and then multilayer graphene, showing PECVD growth on ED copper is not self‐limited. The process also beneficially modifies the ED copper substrate, like removing the surface zinc layer and changing copper grain size and orientation, thus improving graphene growth. Additionally, the study includes high‐frequency scattering parameter (S‐parameter) measurements in a coplanar waveguide (CPW) system. This involves graphene on a sapphire substrate with a silver electrode. The S‐parameter data indicate that the CPW with graphene shows reduced insertion losses in high‐frequency circuits compared to those without graphene. This underscores graphene's role in reducing insertion losses between metallic and dielectric layers in high‐frequency settings, offering valuable insights for industrial and technological applications.

Funder

Industrial Technology Research Institute

Ministry of Education

Publisher

Wiley

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