1. Department of Electronic Engineering Tsinghua University Beijing 100084 China
2. Frontier Science Center for Quantum Information Tsinghua University Beijing 100084 China
3. International Center for Nano‐Optoelectronics Tsinghua University Beijing 100084 China
4. College of Integrated Circuits and Optoelectronic Chips Shenzhen Technology University Shenzhen 518118 China