1. Institute of Energy Innovation College of Materials Science and Engineering Taiyuan University of Technology Taiyuan 030024 China
2. Beijing Key Laboratory of Multiphase Flow and Heat Transfer for Low Grade Energy Utilization North China Electric Power University Beijing 102206 China
3. Faculty of Materials Science and Engineering Taiyuan University of Science and Technology Taiyuan 030024 China
4. Department of Microsystems University of South‐Eastern Norway Horten 3184 Norway