Affiliation:
1. Graduate School of Engineering; Tohoku University; Japan
2. WPI Advanced Institute for Materials Research; Tohoku University; Japan
Subject
Applied Mathematics,Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy,Signal Processing
Reference11 articles.
1. Mechanical properties of a micron-sized SCS film in a high-temperature environment;Nakao;J Micromech Microeng,2006
2. Stress analysis of transistor structures considering the internal stress of thin films;Miura;JSME Int J Ser A,1996
3. Millimeter-scale, micro-electro-mechanical systems gas turbine engine;Epstein;J Eng Gas Turbines Power,2004
4. Study on a PECVD SiC-coated pressure sensor;Zhang;J Micromech Microeng,2007
5. A silicon carbide capacitive pressure sensor for high temperature and harsh environment applications;Chen;Proc Int Conf on Solid State Sensors, Actuators, and Microsystems, Transducers ’07