Author:
Suyama Shiro,Okamoto Akio,Shirai Seiiti,Serikawa Tadashi
Subject
Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy
Reference23 articles.
1. , , and . 1990 SID Int. Symp. Dig. Tech. Papers, 508 (1990).
2. , , , , and . 1983 SID Int. Symp. Digest of Technical Papers, 156 (1983).
3. Proc. Int. Display Res. Conf., 208 (1988).
4. The Formation of SiO2 in an RF Generated Oxygen Plasma: I . The Pressure Range Below 10 mTorr
5. Comparison of properties of dielectric films deposited by various methods