A wafer-capped, high-lifetime ohmic MEMS RF switch-Reference-Cited by-同舟云学术

A wafer-capped, high-lifetime ohmic MEMS RF switch

Published:2004 Issue:4 Volume:14 Page:338-344
ISSN:1096-4290
Container-title:International Journal of RF and Microwave Computer-Aided Engineering
language:en
Short-container-title:Int J RF and Microwave Comp Aid Eng

Author:

Lampen J.,Majumder S.,Morrison R.,Chaudhry A.,Maciel J.

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Computer Graphics and Computer-Aided Design,Computer Science Applications

Reference6 articles.

1. RF MEMS switches and switch circuits

2. Micromechanical switches fabricated using nickel surface micromachining

3. and Measurement and modeling of surface micromachined, electrostatically actuated microswitches, Proc Int Conf Solid-State Sensors and Actuators, Transducers'97, Chicago, IL, 1997.

4. and Design, characterization and application of surface micromachined, electrostatically actuated microswitches, NARM Conf, Chicago Il, 1998.

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