P‐10.11: Pixelation of Nano‐LED arrays with high effective light‐emitting area ratio by ion injection: A Simulation study

Author:

Ye Jinyu1,Zhang Jiawei1,Zhou Xiongtu12,Zhang Yongai12,Wu Chaoxing12,Guo Tailiang12,Yan Qun12

Affiliation:

1. School of Physics and Information Engineering Fuzhou University Fuzhou China 350108

2. Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China Fuzhou, Fujian China 350116

Abstract

The etch damage caused by the conventional bench-top etching process makes it difficult to produce Nano-LED devices. Recently, some scholars have studied the use of ion injection to achieve electrical isolation between pixels for the purpose of pixelation. In this paper, we focus on the distribution characteristics of ions in GaN targets to improve the effective light-emitting area ratio of devices by reducing the lateral diffusion effect of ions.

Publisher

Wiley

Subject

General Medicine

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