Photoreactive fluorinated polyimide protected by tetrahydropyranyl (THP) group based on chemical amplification: Acid generation in polyimide film and lithographic properties-Reference-Cited by-同舟云学术

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Photoreactive fluorinated polyimide protected by tetrahydropyranyl (THP) group based on chemical amplification: Acid generation in polyimide film and lithographic properties

Published:1993-05 Issue:4 Volume:4 Page:294-301
ISSN:1042-7147
Container-title:Polymers for Advanced Technologies
language:
Short-container-title:Polym. Adv. Technol.

Author:

Naitoh Kazuhiko,Ishii Kazuhisa,Yamaoka Tsuguo,Omote Toshihiko

Publisher

Wiley

Subject

Polymers and Plastics

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Positive-tone chemically amplified photosensitive polyimides with controllable taper angles;Materials Today Chemistry;2023-07

2. Photoluminescence, thermal and surface properties of triarylimidazole-containing polyimide nanocomposite films;RSC Advances;2021

3. Aromatic Polyimides Containing Main-Chain Diphenylaminofluorene–Benzothiazole Motif: Fluorescence Quenching, Two-Photon Properties, and Exciplex Formation in a Solid State;Macromolecules;2011-08-25

4. Heat-resistant photoresists based on new imaging technique: reaction development patterning;Journal of Micro/Nanolithography, MEMS, and MOEMS;2004-01-01

5. Photosensitive fluorinated polyimides with a low dielectric constant based on reaction development patterning;Journal of Polymer Science Part A: Polymer Chemistry;2003-01-31

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