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A Method for the Ion Density Estimation from the Double Probe Data at Medium and Higher Pressures

  • Published:1994 Issue:1 Volume:34 Page:51-57
  • ISSN:0863-1042
  • Container-title:Contributions to Plasma Physics
  • language:en
  • Short-container-title:Contrib. Plasma.Phys.

Author:

Šicha M.,Tichý M.,Hrachový V.,David P.,David T.,Touš J.

Publisher

Wiley

Subject

Condensed Matter Physics

Reference17 articles.

1. A Floating Double Probe Method for Measurements in Gas Discharges

2. , , Proc. VI. Conference on Quantum Electronics and Non-Linear Optics. Poznan (Poland), 1974, Vol. A-27, p. 149.

3. , Proc. 10th International Symposium on Combustion. The Combustion Institute, 1965, p. 657.

4. Continuum Theory of Spherical Electrostatic Probes

5. An Experimental Study of the Cylindrical Langmuir Probe Response in the Transition Regime

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2. Diagnostics and modeling of CH[sub 4]–CO[sub 2] plasmas for nanosmooth diamond deposition: Comparison to experimental data;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009

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