22.4: Invited Paper: Pigmented Chemical Amplified Resist in Ultra-fine resolution Color Filter Application: Positive Versus Negative Tone

Author:

Cheng Yi-Ming1

Affiliation:

1. Topgiga Material Corp.; Taiwan

Publisher

Wiley

Reference8 articles.

1. New UV Resists with Negative or Positive Tone;Ito;Digest of Technical Papers of 1982 Symposium on VLSI Technology

2. Chemical Amplification in the Design of Dry Developing Resist Materials;Ito;Technical Papers of SPE Regional Technical Conference on Photopolymers,1982

3. Novel Photoacid Generators;Asakura;J. Photopolym. Sci. Technol,2000

4. Novel nonionic photoacid generator releasing strong acid for chemically amplified resists;Yamato;Proc. SPIE,2004

5. Prepolymers and reactive diluents for UV and EB curable formulations. In Chemistry & Technology of UV & EB Formulation for Coatings;Allen,1991

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