Affiliation:
1. Institute of Nanoscale and Biobased Materials Technische Universität Bergakademie Freiberg Gustav‐Zeuner‐Str. 3 09599 Freiberg Germany
2. Infineon Technologies Dresden GmbH & Co. KG Königsbrücker Str. 180 01099 Dresden Germany
3. Institute for Plant and Wood Chemistry Technische Universität Dresden Pienner Straße 19 01737 Tharandt Germany
Abstract
AbstractGas sensors based on micro‐electromechanical systems (MEMS) offer advantages such as a broad spectrum of potentially sensitive materials and analytes, easy miniaturization and integration, high sensitivity, and low costs. This paper introduces a novel MEMS sensor platform utilizing a suspended gate field effect transistor (SGFET) transducer. In this approach, the flexible gate membrane of the SGFET is coated with a sensitive material exhibiting responsive swelling behavior. For the proof of concept, kraft lignin hydrogel is chosen as a biorenewable material for humidity sensing. A precision dispensing technique is used to deposit kraft lignin hydrogel on the SGFETs. The sensor measurements yield reversible shifts in the sensor's output current of up to 9% in response to 5000 ppm water vapor. The results successfully demonstrate the feasibility of this new sensing platform.